Fundamentals of microfabrication (Record no. 382)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00508nam a2200193Mi 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 0849308267 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780849308260 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Item number | MAD |
| 100 1# - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Madou, Marc J. |
| 245 00 - TITLE STATEMENT | |
| Title | Fundamentals of microfabrication |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2. ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Boca raton [u.a.] |
| Name of publisher | CRC Press |
| Year of publication | 2011 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 723 S. |
| Other physical details | zahlr. Ill. und graph. Darst. |
| 650 07 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Mikrofertigung |
| 650 07 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Fertigungstechnik |
| 650 07 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Lithographie <Halbleitertechnologie> |
| 650 07 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Mikrosystemtechnik |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Collection code | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Full call number | Accession Number | Koha item type |
|---|---|---|---|---|---|---|---|---|---|
| EEE | Mahindra University VNLRC | Mahindra University VNLRC | Reference | 03/11/2014 | BOOKIONICS | 1495.00 | MAD | 1136 | Reference |