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Fundamentals of microfabrication

Madou, Marc J.

Fundamentals of microfabrication - 2. ed. - Boca raton [u.a.] CRC Press 2011 - 723 S. zahlr. Ill. und graph. Darst.

ISBN: 0849308267 9780849308260

Subjects--Topical Terms:
Mikrofertigung
Fertigungstechnik
Lithographie
Mikrosystemtechnik

Dewey Class. No.: / MAD

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