000 00390pam a2200145 i 4500
999 _c8053
_d8053
020 _a9780201444940
082 0 4 _a621.38173
_bJAE
100 1 _aJaeger, Richard C.
245 1 0 _aIntroduction to microelectronic fabrication /
260 _aReading, Mass. :
_bAddison-Wesley Pub. Co.,
_cc1988.
300 _axiii, 232 p. :
_bill. ;
650 0 _aIntegrated circuits
700 _a0
942 _cBK