| 000 | 00390pam a2200145 i 4500 | ||
|---|---|---|---|
| 999 |
_c8053 _d8053 |
||
| 020 | _a9780201444940 | ||
| 082 | 0 | 4 |
_a621.38173 _bJAE |
| 100 | 1 | _aJaeger, Richard C. | |
| 245 | 1 | 0 | _aIntroduction to microelectronic fabrication / |
| 260 |
_aReading, Mass. : _bAddison-Wesley Pub. Co., _cc1988. |
||
| 300 |
_axiii, 232 p. : _bill. ; |
||
| 650 | 0 | _aIntegrated circuits | |
| 700 | _a0 | ||
| 942 | _cBK | ||