000			00498nam a2200145 454500
999			_c7812 _d7812
020			_a9781420055191
082			_a620.5 MAD
100			_aMadou, Marc J. .,
245			_aFundamentals of microfabrication and nanotechnology: Vol II Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
250			_a3rd ed.
260			_aNew York: _bTaylor &​ Francis, _c 2011. .
300			_av.p.: _bill;
500			_aIncludes bibliographical references and index.
942			_cBK