000			00497cam a22001814a 4500
020			_a9781420055115
082	0	0	_a620.5 _bMAD
100	1		_aMadou, Marc J.
245	1	0	_aFundamentals of microfabrication and nanotechnology / VOL-I
250			_a3rd ed.
260			_aBoca Raton, FL : _bCRC Press, _c2012.
300			_a656p.
650		0	_aMicroelectromechanical systems.
650		0	_aNanoelectromechanical systems.
650		0	_aMicrofluidics.
650		0	_aSolid-state physics.
942			_cBK
999			_c7811 _d7811