| 000 | 00514cam a2200193 a 4500 | ||
|---|---|---|---|
| 020 | _a9781574446753 | ||
| 020 | _a1574446754 | ||
| 082 |
_a621.3815 _bDOE |
||
| 100 | _aDoering Robert & Nishi Yoshio | ||
| 245 | 0 | 0 | _aHandbook of semiconductor manufacturing technology / |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton, Fla. : _bCRC Press, _cc2008. |
||
| 300 |
_aI.26 _bill. |
||
| 650 | 4 | _aSemiconductors | |
| 650 | 4 | _aSemiconductor industry | |
| 700 | 1 | _aDoering, Robert, | |
| 700 | 1 | _aNishi, Yoshio, | |
| 942 | _cBK | ||
| 999 |
_c5494 _d5494 |
||