000 00514cam a2200193 a 4500
020 _a9781574446753
020 _a1574446754
082 _a621.3815
_bDOE
100 _aDoering Robert & Nishi Yoshio
245 0 0 _aHandbook of semiconductor manufacturing technology /
250 _a2nd ed.
260 _aBoca Raton, Fla. :
_bCRC Press,
_cc2008.
300 _aI.26
_bill.
650 4 _aSemiconductors
650 4 _aSemiconductor industry
700 1 _aDoering, Robert,
700 1 _aNishi, Yoshio,
942 _cBK
999 _c5494
_d5494