000			00455cam a2200169 a 4500
020			_a0890066205
082	0	0	_a621.381520113 _bTOM
100	1		_aTomizawa, Kazutaka.
245	1	0	_aNumerical simulation of submicron semiconductor devices
260			_aBoston : _bArtech House, _c1993.
300			_axiv, 341 p. :
650		0	_aSemiconductors
650		0	_aMonte Carlo method.
650		0	_aElectron transport.
650		0	_aMicrostructure.
942			_cBK
999			_c5358 _d5358