000 00704cam a2200217 a 4500
020 _a9781420065626
020 _a1420065629
082 0 0 _a621
_bGIU
100 1 _aGiurgiutiu, Victor.
245 1 0 _aMicromechatronics :
250 _a2nd ed.
260 _aBoca Raton :
_bCRC Press,
_cc2015
300 _axxviii, 920 p. :
_bill. ;
490 1 _aNano- and microscience, engineering, technology, and medicine series
650 0 _aMechatronics.
650 0 _aMicroelectromechanical systems.
700 1 _aLyshevski, Sergey Edward.
856 4 2 _uhttp://www.loc.gov/catdir/enhancements/fy0905/2008047996-d.html
856 4 2 _uhttp://www.loc.gov/catdir/enhancements/fy0908/2008047996-b.html
942 _cBK
999 _c5064
_d5064