| 000 | 00363cam a22001337ar4500 | ||
|---|---|---|---|
| 020 | _a9781574446753 | ||
| 082 | 0 | 0 |
_a621.38152 _bDOE |
| 100 | _aDoering Robert & Nishi Yoshio | ||
| 245 | 1 | 0 | _aHandbook of semiconductor manufacturing technology |
| 250 | _a2. ed. | ||
| 260 |
_aBoca Raton : _bCRC/Taylor & Francis, _c[2007], cop. 2008 |
||
| 300 | _ap. cm. | ||
| 942 | _cBK | ||
| 999 |
_c3779 _d3779 |
||