000 00546nam a2200169Ia 4500
020 _a9788131726044
082 _a621.395
_bPLU
100 _aPlummer, James D.
245 _aSilicon VLSI technology
260 _aNew Delhi
_bPEARSON
_c2009
300 _axiv,817p
650 _aIntegrated circuits-very large integration-Design and construction; Silicon; Silicon oxide films; Metal oxide semiconductors; Silicon-on-insulator technology
700 _aDeal, Michael D.
700 _aGriffin, Peter B.
700 _aPlummer, James D.
942 _cBK
999 _c2178
_d2178