000 00314 a2200145 4500
020 _a9788131764756
082 _a621.31
_bLIU
100 _aLIU (Chang)
245 _aFoundations of Mems
250 _a2
260 _c2012
_aNew Delhi
_bPearson Education
300 _a576
_b24
650 _aElectronics
942 _cBK
999 _c197
_d197