000 00303cam a2200121ua 4500
020 _a9780849312625
082 _a621.381
_bLYS
100 _aLyshevshi ,Sergey Edward
245 _aMems and Nems : : system device and structures
260 _aNew York
_bCRC Press
_c2010
300 _a430p.
942 _cBK
999 _c15764
_d15764