TY  - BOOK
AU  - Jaeger,Richard C.
AU  - 0
TI  - Introduction to microelectronic fabrication
SN  - 9780201444940
U1  - 621.38173 
PY  - 1988///
CY  - Reading, Mass.
PB  - Addison-Wesley Pub. Co.
KW  - Integrated circuits
ER  -