TY  - BOOK
AU  - Madou, Marc J. .,
TI  - Fundamentals of microfabrication and nanotechnology: Vol II Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
SN  - 9781420055191
U1  - 620.5 MAD 
PY  - 2011///.
CY  - New York
PB  - Taylor &​ Francis
N1  - Includes bibliographical references and index.
ER  -