TY  - BOOK
AU  - Madou,Marc J.
TI  - Fundamentals of microfabrication and nanotechnology / VOL-I
SN  - 9781420055115
U1  - 620.5 
PY  - 2012///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Nanoelectromechanical systems
KW  - Microfluidics
KW  - Solid-state physics
ER  -