TY  - BOOK
AU  - Brodie,Ivor
AU  - Muray,Julius J.
TI  - The physics of micro/ nano-fabrication 
SN  - 9788184894134
U1  - 621.381 
PY  - 1992///
CY  - Chennai
PB  - Yes Dee Publishing Pvt. Ltd.
KW  - Microelectronics
KW  - Thin-film circuits
ER  -