TY  - BOOK
AU  - Doering Robert & Nishi Yoshio
AU  - Doering,Robert
AU  - Nishi,Yoshio
TI  - Handbook of semiconductor manufacturing technology
SN  - 9781574446753
U1  - 621.3815 
PY  - 2008///
CY  - Boca Raton, Fla.
PB  - CRC Press
KW  - Semiconductors
KW  - Semiconductor industry
ER  -