TY  - BOOK
AU  - Hsu, Tai-Ran
TI  - MEMS & Microsystems Design and Manufacture
SN  - 9780070487093
U1  - 621.381 
PY  - 2002///
CY  - New Delhi
PB  -  Tata Mcgraw-Hill Publishing Company
KW  - Electronics
ER  -