TY  - BOOK
AU  - Allen,James J.
TI  - Micro electro mechanical system design / 
SN  - 9780824758240
U1  - 621 
PY  - 2005///
CY  - Boca Raton
PB  - CRC
KW  - Engineering design
KW  - Microelectromechanical systems
ER  -