Handbook of semiconductor manufacturing technology / (Record no. 5494)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00514cam a2200193 a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781574446753 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 1574446754 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3815 |
| Item number | DOE |
| 100 ## - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Doering Robert & Nishi Yoshio |
| 245 00 - TITLE STATEMENT | |
| Title | Handbook of semiconductor manufacturing technology / |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Boca Raton, Fla. : |
| Name of publisher | CRC Press, |
| Year of publication | c2008. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | I.26 |
| Other physical details | ill. |
| 650 #4 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Semiconductors |
| 650 #4 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Semiconductor industry |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Doering, Robert, |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Nishi, Yoshio, |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Collection code | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Full call number | Accession Number | Koha item type |
|---|---|---|---|---|---|---|---|---|---|
| EEE | Mahindra University VNLRC | Mahindra University VNLRC | General Stacks | 14/09/2016 | Bookionics | 6000.00 | 621.3815 DOE | 10682 | Books |