Handbook of semiconductor manufacturing technology (Record no. 3779)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00363cam a22001337ar4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781574446753 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | DOE |
| 100 ## - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Doering Robert & Nishi Yoshio |
| 245 10 - TITLE STATEMENT | |
| Title | Handbook of semiconductor manufacturing technology |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2. ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Boca Raton : |
| Name of publisher | CRC/Taylor & Francis, |
| Year of publication | [2007], cop. 2008 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | p. cm. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Collection code | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Full call number | Accession Number | Koha item type |
|---|---|---|---|---|---|---|---|---|---|
| Mec & Aerospace Engg | Mahindra University VNLRC | Mahindra University VNLRC | Reference | 20/05/2016 | Book Ionics | 6000.00 | 621.38152 DOE | 7903 | Books |