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Fundamentals of microfabrication and nanotechnology / VOL-I

Madou, Marc J.

Fundamentals of microfabrication and nanotechnology / VOL-I - 3rd ed. - Boca Raton, FL : CRC Press, 2012. - 656p.

ISBN: 9781420055115

Subjects--Topical Terms:
Microelectromechanical systems.
Nanoelectromechanical systems.
Microfluidics.
Solid-state physics.

Dewey Class. No.: 620.5 / MAD

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