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The physics of micro/ nano-fabrication

Brodie, Ivor.

The physics of micro/ nano-fabrication - Chennai : Yes Dee Publishing Pvt. Ltd., 1992. - xix, 650 p.

ISBN: 9788184894134

Subjects--Topical Terms:
Microelectronics.
Thin-film circuits.

Dewey Class. No.: 621.381 / BRO

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